Date: 16th August 2016
Tantalum rotatable sputtering targets
Product Name: tantalum tube, tantalum capillary tubeExecution standard: B521-98 ASTMBrand: RO5200, RO5400, RO5252 (Ta-2.5W), RO5255 (Ta-10W)Specifications: diameter 1.0-150mmThickness 0.2-5.0MMLength 200mm-6000mmchemical composition??mian compositionothers ?max%TaNbFeSiNiWMoTiNbOCHNTa1remind??0.0050.0050.0020.010.010.0020.040.020.010.00150.01Ta2remind??0.030.020.0050.040.030.0050.10.030.010.00150.01TaNb3remind?3.50.030.030.0050.040.030.005??0.030.010.00150.01TaNb20remind17.0?23.00.030.030.0050.040.030.005??0.030.010.00150.01Ta2.5Wremind0.0050.0050.0023.00.010.0020.040.020.010.00150.01Ta10Wremind0.0050.0050.002110.010.0020.040.020.010.00150.01If users have special requirements, the two sides agreedTable 1. Outside diameter and wall thickness toleranceOD,inch(mm)OD Tolerance, inch(mm), +/-?wall thickness tolerance, %, +/-??<1 (25.4)0.004 (0.102)?10??1~1.5 (25.4~38.1)0.005 (0.127)?10??1.5~2 (38.1~50.8)0.006 (0.152)?10??2~2.5 (50.8~63.5)0.007 (0.178)?10??2.5~3.5 (63.5~88.9)0.008 (0.254)?10??Table two. Mechanical properties (annealed)GradeUltimate tensile strength,Pounds per inch (MPa) 2Minimum yield strength,Pounds per inch 2 (MPa)Elongation, min,%1 inch (25.4 mm) mark?RO5200/RO5400?30000 (207)20000 (138)?25??RO525240000 (276)?28000?(193)?20??RO525570000 (481)?60000 (414)?15??RO524040000?(276)?28000 (193)?20??
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